[This article belongs to Volume - 54, Issue - 02]
Gongcheng Kexue Yu Jishu/Advanced Engineering Science
Journal ID : AES-26-12-2022-73

Title : FABRICATION TECHNIQUES FOR PREPARATION OF LEAD ZIRCONATE TITANATE (PZT) THIN FILMS-A PROMISING SOLID SOLUTION FOR APPLICATIONS AS SENSOR, TRANSDUCERS, MEMS AND ENERGY HARVESTING
Ram Chhavi Sharma, Reetu, Vibhawari Srivastava

Abstract :

: Lead Zirconate Titanate (PZT) in micrometre thin film attract significant attention due to wide range applications as sensor, transducers, MEMS and energy harvesting. The properties like high magnetoelectric (ME) coupling, breakdown strength, remanent polarization, electric field coupling, ease of miniaturization along with ferroelectric, dielectric and optical properties make it as versatile material for such applications. For effective results, the selection of fabrication technique to prepare a particular solid solution is of significance. Depending on the study undertaken, the different fabrication techniques are used for the preparation of thin film. The prepared PZT thin films were tested using suitable characterization techniques. Some findings and their critical analysis based on research studies undertaken are presented in this article.